Maskless Lithography System

Down to 0.5um resolution fully automated Maskless Lithography tool is to meet the all expectation of variety of user's needs.

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Inspection & Metrology Systems

Inspection tools for defects on outside or inside at Si-Wafer or glass substrate with our unique optics and image processing technology.

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Expand New Business

Offer optimum solutions as an expert of Precise Laser Processing Technology.



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What's New

Dec 25, 2015
Discontinued Product Anouncement Takumi Mark VI
July, 2015
Renewal of our Website
July, 2015
Relocation of our head office. See more details.
January 21, 2014
Relocation of our head office. See more details.
June 30, 2011
Our Maskless Lithography System won the Innovation prize.