Maskless Lithography System

Sub-micron resolution Maskless Lithography tool with extremely fastpatterning speed.
Easy to create 3D structure onto photo-resist.

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Inspection & Metrology Systems

Inspection tools for defects on outside or inside at Si-Wafer or Glass substrate with our unique optics and image processing technology.

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Wafer ID Reader

An optical illumination unit for the purpose of reading alphanumberic, barcode and 2D codes which have been laser-inscribed or exposed and etched onto silicon wafers.
Our in-house designed specialty telecentric lens and illumination system provides clear images to the reading software to allow extremely accurate recognition.

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